无掩模腐蚀下的凸角削角及补偿研究

A Study on the Principles and the Compensation for Maskless-etched Convex-corner Undercutting

在使用无掩模腐蚀制作硅微机械结构时,其结构凸角的削角特性有别于常规有掩模腐蚀时的情况.本文通过分析和实验,研究了该情况下凸角削角尺寸的变化规律和特点,并给出了对其进行补偿的原则和方法.

Thc Charactristics of maskless-etched convex-corner undercutting is differentfrom that formed by conventional masked etching. In this paper the principles of the mask-less-etched undercutting are investigated by using both analyses and experiments. Theregularities and the practical methods of the compensation for the maskless-etched under-cutting are provided.