基于聚酰亚胺的电容式湿度传感元件的研制

Research on Capacitive Humidity Sensor Based on Polyimide

以P型单晶硅为基片,聚酰亚胺为湿敏介质,钛和金为电极材料,通过氧化SiO2绝缘层、磁控溅射平板下电极和栅状上电极、涂敷湿敏介质及其亚胺化,制作了平行板电容式湿度传感元件.介绍了传感元件的制造工艺和感湿机理,测试了成品的湿敏特性,对测试结果进行了分析.结果表明本文研制的湿度传感器设计合理、性能稳定,可满足湿度测量的要求,其性能主要取决于聚酰亚胺膜的制备过程,以及栅状上电极的结构.

By creating SiO2 layer on P-doped silicon substrate,magnetic control splashing Ti-Aulower electrode and Ti-Au bar upper electrode, spin-coating sense humidity film and imidization reaction, a parallel plate capacitive humidity sensor was made. The fabrication technology of the sensor and mechanism of sense humidity are presented. The characteristics of the sensor are tested and the test results are analyzed. The results show the sensor has a correct design and stable qualities, and can satisfy the need for measuring moisture, and the sensor＇s properties mainly depend on the fabricating process of PI and the configuration of the bar upper electrode.