摘要
该文针对轮廓法M制触针式表面粗糙度测量仪器由于其驱动速度变化可能引起表面粗糙度评定参数测量准确度受损的问题,从参数的定义、轮廓的滤波特性、轮廓的畸变等方面作出了较为详细的分析和讨论,同时也提出了改善驱动机构速度特性和仪器信号处理方法的一些思路和建议。
This paper discusses and analyses the drive velocity impacting accuracy of measurement on surface texture parameter from define of roughness parameter, filter characterristic of surface texture profile, aberration of profile and so on by the stylus instruments for the measurement of surface roughness by the profile method by the system M .At the same time it also bring forward several ideas and methods to improve velocety characteristic of drive framework and signal processing method.
出处
《上海计量测试》
2009年第5期21-24,共4页
Shanghai Measurement and Testing
关键词
表面粗糙度
表面结构
粗糙度测量
驱动速度
测量准确度
surface roughness
surface texture
roughness measurement
drive velocety
accuracy of measurement