摘要
提出一种光机复合高精度非接触光电成像检测新方法实现有限深腔内盲孔的形位尺寸检测。系统由精密传动机构、光学内窥系统、精密光栅传感检测系统、图像采集及处理系统组成。系统通过高精度的传动机构配合,使内窥光学系统在有限的深腔内线性移动,并利用高分辨率CCD摄像技术获取盲孔图像,通过图像处理完成深腔盲孔形位尺寸的测量。通过实例测试表明系统精度高于10μm。
The paper puts forward a new high-precise non-contact measuring method combining photoelectricity and machinery in limited deep cavity to detect form and position of blind hole. System is composed of high-precise drive mechanism, endoscopic optical path, precision raster part, imaging acquisition and processing part. Endoscopic optical system is moved linearly through drive mechanism in limited deep cavity, high-resolution CCD camera acquires image of blind hole, then system completes form and position measurement of blind hole through image processing. The example indicates precise reaches 10μm.
出处
《激光与红外》
CAS
CSCD
北大核心
2009年第9期961-964,共4页
Laser & Infrared
基金
吉林省科技厅重大支撑计划项目(No.20080351)资助
关键词
盲孔
内窥光路
光电成像
图像处理
blind hole
endoscopic optical path
photoeleetricity image
image processing
