摘要
本文利用定量迁移率谱分析技术,通过研究样品霍尔系数和电阻率对磁场强度的依赖关系,获得了样品中参与导电的电子和空穴的浓度和迁移率,结果表明了定量迁移率谱分析方法具有很高的准确性和可靠性,并且它对样品中少子的贡献非常敏感.
Abstract By using quantitative mobility spectrum analysis (QMSA) technique, the free electron and hole concentrations and mobilities are determined from field dependent Hall and resistivity data. The results confirm that the QMSA yields accurate and reliable concentrations and mobilities for all classes of carrier in the sample, and also has greater sensitivity to minority carrier concentrations. The QMSA is found to be a suitable standard tool for the routine electrical characterization of semiconductor materials and devices.
基金
国家自然科学基金