摘要
探讨了一种新颖开管扩镓系统的基本原理和实施方法，用于各类晶闸管的制造，使器件具有触发参数一致性好，通态特性优良，ｄｖ／ｄｔ、ｄｉ／ｄｔ耐量高等特点．实践证明。
Abstract A new open tube Ga diffusion system is proposed and discussed. With use of this diffusion system to fabricate thyristors, the devices can have a good consistence of trigger parameters, excellent “on state” characteristics, high d v /d t and d i /d t capabilities. This new technology is worth to spread in the power semiconductor device fabrication.
