铝及其氮化物表面干法氧化的研究进展

Research Progress of Oxidation on Aluminium and Aluminium Nitride Films in Dry Atmosphere

介绍了铝及其氮化物表面干法氧化的研究现状及发展前景。总结了不同氧化方法对铝氧化膜性质的影响,并对采用干法制备铝氧化膜及氮氧化膜技术的发展前景进行了展望,指出采用铝表面的热氧化、多组分等离子氧化制备铝氧化膜或氮氧化膜将成为铝氧化技术新的发展方向。

The research progress and prospect of oxidation on aluminium and aluminium nitride films in dry atmosphere were reviewed. The effects of oxidation methods on the properties of different oxidation films were summarized. It is pointed out that thermal oxidation and multiplex component plasma oxidation for producing aluminium oxide films or aluminium oxynitride films would be a new direction of the development for aluminium oxidation technology.