基于DSP的高精度激光干涉仪的研制

Research and Development of Highly Accurate Laser Interferometer Based on DSP

当前激光干涉仪的信号处理系统主要采用单片机技术和4细分辨向电路,存在硬件电路复杂、易受外界干扰、难以实现复杂算法等问题。因此,提出了将DSP技术引入到激光干涉仪的信号处理系统中,设计了一种用于处理干涉条纹信号的专用电路。具体研究了改进的8细分算法,并给出了系统的主要程序。实验结果表明,基于DSP的激光干涉仪具有电路简单、功能强大等优点,进一步提高了激光干涉仪的测量精度和分辨力。

At present, the signal processing system in laser interferometer is mainly composed of 4-subdivision direction distinguishing circuit based on technology of single chip computer. It brings the problems of complex hardware circuit, affected easily by external interference and complicated algorithm that is hard to be implemented, etc. Thus the DSP （digital signal processing） technology has been introduced in signal processing system of laser interferometer; and a dedicated circuit for processing interference fringes signal is designed. The improved 8-subdivision algorithm is researched concretely ; and the main program of the system is given. The result of experiment indicates that the laser interfero ometer based on DSP features advantages of simple circuitry, powerful functions, and high resolution, etc.