摘要
x射线光电子能谱(XPS)是材料表面元素定性和半定量分析的重要手段之一。在XPS测量实验中,使用绝缘方法来安置导电不均匀样品到导电的样品台上进行常规XPS测量,方便地得到满意的图谱数据;在数据处理中,针对扫描谱图中的峰位、峰强度、峰宽和峰形等情况,利用XPS图谱分析软件的拟合分析功能,对多价态混合的复杂样品(例如:Ce和Fe的多价态样品)的XPS图谱进行处理,采用单一价态的实验数据为模版对混合图谱进行拟合处理,比较容易地获得常规方法不易得到的不同价态的定性及半定量结果。本文对以上方法分别作举例说明。
With the use of modem conventional XPS instrument, the careful sample settlement and measurement should be taken for special non-uniform conductive samples to obtain correct spectra. Method of insulating the sample completely from the conductive sample stage was fairly simple way in our experiments. On the other hand, the complex XPS spectrum analysis of multi-chemical states element or sample was archived by special curve fitting method which developed by using experimental data of different chemical state. Chemical states and quantitative results of the complex samples, such as Ce or Fe containing samples, can be easily obtained comparing with the normal curve fitting method. Some examples of sample preparation and curve fitting were presented.
出处
《现代仪器》
2009年第5期16-20,共5页
Modern Instruments
基金
北京大学测试基金大力支持
