摘要
本文建立三氯氢硅中钙、镁、铜、铁、铝、硼和磷的电感耦合等离子体发射光谱(ICP-AES)测定方法。方法的检出限为0.00～0.018μg/mL,回收率为92%～109%,相对标准偏差(RSD)为1.28% ～4.65%。该方法很实用,结果令人满意。
A method for determination of Ca, Mg, Cu, Fe, Al, B and P in Trichlorosilane by ICP-AES is presented in this paper. The detection limit was 0.001-0.018μg/mL. The recoveries were 92%-109%. The relative standard deviations（RSDs） were 1.28%-4.65%.The method was very useful and with satisfactory results.
出处
《现代仪器》
2009年第5期54-55,共2页
Modern Instruments
关键词
ICP-AES
三氯氢硅
杂质
ICP-AES Trichlorosilane Determination of impurity elements
