用图像处理技术计算薄膜厚度和表面粗糙度

Application of digital image processing in calculation of the film thickness and surface roughness

应用数字图像技术处理薄膜的断面扫描电子显微照片,定量分析薄膜材料的厚度和表面粗糙度。根据薄膜的断面扫描电子显微照片的特征,用垂直投影法计算阈值,根据阈值对薄膜显微照片进行二值化处理,获取薄膜材料表面图像;再将二值化后的图像做垂直投影,确定薄膜表面区域,并根据该区域区间去除噪音。对已提取的薄膜表面细化,提取薄膜表面轮廓线;确定薄膜的平均表面并计算出表面的粗糙度。应用局部垂直投影法,确定薄膜与衬底之间的界面位置。根据薄膜的平均表面的位置和界面的位置,计算出薄膜的厚度。

Film thickness and surface roughness in the scanning electron microscopy （SEM） microphotograph are quantitatively analyzed by using digital image processing. According to the SEM microphotograph characteristics, the binarization treatment of the digital image is carried out using a vertical projection method to obtain the film surface image. Then the vertical projection method is used again to determine the film surface region and filter the noise in order to obtain a contour line of the film surface. The equivalent surface and the film surface roughness can be calculated. Furthermore, an interface line between the film and the substrate is also determined by the vertical projection method. Finally, the film thickness is calculated according to the equivalent surface and the interface line.