台阶高度的评定方法

Evaluation Method of Step Height

台阶高度在纳米计量领域是一个重要的参数。纳米精密测量条件下,用不同测量原理对台阶和线宽等有关尺度测量结果差异的解释与裁决,需要国际间协同进行合作比对。而微细结构的台阶高度测量已成为当前纳米测量技术和纳米计量标准的重要课题之一,已得到了世界主要工业国家的普遍重视。有必要对此工业界和学术界使用的不同台阶高度计量方法做一个总结和比较。

Step height measurement is a precision metrology technique used to determine the height or depth of a step （or any feature） in nano-surface standard. The nano-standard with a high reliability becomes increasingly important for all measurements to be traceable to the national standard. The evaluation method of step height not only provides a foundation for measurement and characterization of nanomaterials and devices, but also plays an important role in the fields of production process control and quality management in nanotechnology. The metrological problems and transfer-standards in nanometrology, preliminary comparison on step height standards were discussed in this paper.