摘要
针对传统的传感器无法进行长期健康监测的不足,研发出一套新型的基于MEMS的硅微电容式传感器。对所研制的MEMS传感器的静态传感特性和动态特性进行了理论分析和对比实验研究。结果表明:MEMS硅微电容式传感器在反复加卸载实验中,线性拟和度均在0.999%F.S以上,灵敏度系数为6.9840με/kN,其重复性误差为1.43%F.S;其动态传感特性与传统的加速度计吻合的很好。
Aiming at the disadvantage of traditional sensor for structural health monitoring for a long time, a new type of micro capacitive sensor based on MEMS is developed. The static and dynamic sensing characteristics are analyzed in theory and in compared experiment. The results show that the linearity is above 0. 999%F. S under loading-unloading cycles,the sensitivity is 6. 9840με/kN and the repeatability is 1.43% F. S;the dynamic sensing characters is as well as traditional accelerometer.
出处
《传感技术学报》
CAS
CSCD
北大核心
2009年第10期1396-1400,共5页
Chinese Journal of Sensors and Actuators
基金
铁道部攻关项目资助(2007G028)
河北省攻关项目资助(08963523D)
关键词
MEMS传感器
静态传感特性
动态传感特性
线性度
灵敏度
MEMS sensor
static sensing characteristics
dynamic sensing characteristics
linearity
sensitivity
