摘要
永久性气体杂质的检测一直以来是硅烷分析的难点。在此讨论GC-9560-HG电子气体专用氦离子化色谱仪分析硅烷的方法,包括取样方法、样品后处理、色谱柱切割与反吹、进样阀吹扫、自动控制、数据处理等。
The determination of the gaseous impurities has been the obstacle for analyzing silane. A new method was developed for analyzing silane in electric gas using a special helium ionization chromatograph. The sampling method, sample post-treatment, column switching-backflushing technique, value flush, automatic control and data treatment were all introduced in this paper.
出处
《低温与特气》
CAS
2009年第5期39-42,共4页
Low Temperature and Specialty Gases
关键词
气相色谱仪
硅烷
取样与尾气处理
氦离子化色谱法
gas chromatograph
silane
sampling and tail gas treatment
helium ionization chromatograph
