摘要
对各国进行的软X射线多层膜研究所取得的最新成果给出了比较系统全面的评述。首次给出了文献报道的软x射线全波段的各种膜系实测正入射反射率的统计结果。
This is a review of the worldwide studies on multilayer mirrors for soft Xrays. A statistic table of the highest measured reflectivity of the multilayers is given for the whole region of soft X-ray wavelengths.
出处
《激光与光电子学进展》
CSCD
1998年第9期1-7,共7页
Laser & Optoelectronics Progress
关键词
软X射线多层膜
薄膜沉积
反射率
激光技术
soft X-ray multilayer, thin film deposition, reflectivity of the soft x-ray multilayers
