一种新的基于c／v的微电容的检测方法

A New Approach of Micro-capacitor Measurment Based on Conver- sion of Capacitances and Voltages

论文分析了传统及现有小电容检测方法存在的问题，基于C／V电容检测的基本原理，提出了一种新的基于C／V的微电容的检测方法，设计了一个简易的微电容运算放大器检测电路。根据电路模型分析和仿真测试结果表明，该电路具有抗杂敦电容干扰强、灵敏度高、容易实现无损在线检测、成本低等优点。

in this Paper, some of techniques for measuring of small capacitance are briefly discussed. A kind of simple operational amplifier circuit is designed on the basic principle of Conversion of Capacitances and Voltages （C / V） to detect the micro-capacitor. Based on analysis on capacitance detection of the circuit model and simulation test results given, It is shown that a circuit of micro-capacitor measurment based on C / V is of high sensitivity and low cost and easy for realization.