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(Zr,Sn)TiO_4薄膜的制备及电性能研究进展

Research Progress in Preparation and Electric Properties of (Zr,Sn)TiO_4 Thin Films
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摘要 从对薄膜材料不断增长的性能要求出发,介绍了(Zr,Sn)TiO4薄膜的晶体结构特征,主要阐述了其已有的制备工艺及电性能的研究进展。提出(Zr,Sn)TiO4薄膜的制备方法将得到拓展和改进,指出了其今后的研究方向。 From the piont of the increasing requirement on the performance of thin film materials, the crystal structure, preparation technologies, electrical properties of （Zr, Sn）TiO4 thin films were mainly summarized. It was proposed reserch focus was also pionted that the preparation methods would be extended and modified. And the out.
作者 陈飞 周洪庆 朱海奎 韦鹏飞 陈栋 刘敏
机构地区 南京工业大学材料科学与工程学院
出处 《硅酸盐通报》 CAS CSCD 北大核心 2009年第5期986-990,共5页 Bulletin of the Chinese Ceramic Society
基金 江苏省高校中青年学术带头人"青蓝工程"资助项目
关键词 (Zr Sn)TiO4薄膜 晶体结构 制备 性能 （ Zr, Sn） TiO4 thin films crystal structure preparation properties
分类号 O484 [理学—固体物理]
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硅酸盐通报
2009年 第5期

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