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基于变折扣因子EWMA的混合产品批间控制方法 被引量：2

EWMA for run-to-run control with time-varying discount factor in high-mix process
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摘要 批间(run-to-run,简称R2R)控制现今已被广泛用于半导体生产行业.指数加权移动平均(exponet weighted moving average,EWMA)是R2R控制的一种重要算法.折扣因子是EWMA控制期的主要参数.本文在模型中考虑了实际生产过程中混合产品少量多样的特点,引入了基于产品的变折扣因子EWMA控制算法,解决了产品切换时制程输出收敛速度过慢的问题.变折扣因子的引入提高了制程输出的响应速率而并不影响制程输出的稳定性.对实际过程的模拟仿真检验了该控制算法的可行性和优越性. Run-to-run（R2R） control is widely adopted in semiconductor manufacturing industries. Exponent weighted moving average（EWMA） is an important R2R algorithm. Discount factor is a major parameter of EWMA controller. Considering the high-mix characteristics of multi-product in practical manufacturing processes, we adopt the EWMA algorithm with time-varying discount factor to handle the slow convergence-rate in the product-switching phase. It improves the response speed while maintaining the stability of the process. The feasibility and advantages are demonstrated in simulations of practical processes.
作者 侯明阳 郑英 艾兵 郑燕 张杰
机构地区 华中科技大学控制科学与工程系
出处 《控制理论与应用》 EI CAS CSCD 北大核心 2009年第10期1137-1142,共6页 Control Theory & Applications
基金 国家自然科学基金资助项目(60604030)
关键词 批间控制 指数加权移动平均 折扣因子 基于产品的控制 run-to-run control exponent weighted moving average discount factor product-based control
分类号 TN305 [电子电信—物理电子学]
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参考文献9

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同被引文献20

  • 1Mou Chen,Chang-Sheng Jiang,Qing-Xian Wu.Sensor Fault Diagnosis for a Class of Time Delay Uncertain Nonlinear Systems Using Neural Network[J].International Journal of Automation and computing,2008,5(4):401-405. 被引量：4
  • 2ZhaoYixiang,LiHanxiong,DingHan,XiongYoulun.RUN TO RUN CONTROL OF TIME-PRESSURE DISPENSING SYSTEM[J].Chinese Journal of Mechanical Engineering,2004,17(2):173-176. 被引量：6
  • 3GOOD R P,QIN S J.On the stability of MIMO EWMA run-to-run controllers with metrology delay[J].IEEE Transactions on Semiconductor Manufacturing,2006,19(1):78-86.
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  • 5FAN S K,LO L C,CHANG Y J,et al.Prediction of time-varing metrology delay for dEWMA and RLS-LT controllers[J].Journal of Process Control,2012,22(4):823-828.
  • 6CHEN J H,MUNOZ J,CHEN N.Deterministic and stochastic model based run-to-run control for batch processes with measurement delays of uncertain duration[J].Journal of Process Control,2012,22(2):508-517.
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  • 9WANG J,HE Q P.A bayesian approach for disturbance detection and classification and its application to state estimation in run-to-run control[J].IEEE Transactions on Semiconductor Manufacturing,2007,20(2):126-136.
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控制理论与应用
2009年 第10期

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