磁性旋转编码器磁阻磁头研制

Fabrication of the Magneto Resistance Readout Head for Magnetic Rotary Encoder

分析了磁性旋转编码器的工作原理，对磁阻磁头的工作过程作了详细分析．通过差动放大输出及选择高性能磁阻薄膜材料，设计了温度系数小、信噪比高的磁阻磁头．采用半导体工艺制备了磁性旋转编码器磁阻磁头．该磁性旋转编码器具有结构简单、紧凑，响应速度快，抗环境污染能力强和功耗低等优点，可广泛应用于伺服马达、数控机床等．

The mechanism of the magnetic rotary encoder and the working process of the magneto re- sistance readout head are analyzed in detail. By means of the differential amplifier application and the magneto resistance films selection with high magneto resistance ratio, a magneto resistance head with low temperature coefficient and high signal-noise ratio is developed. The head for magnetic rotary en- coder is manufactured by using semiconductor process. The magnetic rotary encoder has the proper- ties such as simple and compact structure, quick response, resistance to humid and dirty environment, low dissipation power and so on. It can be widely used in the field of servo-motor and numerical ma- chine.