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周期多层膜Kirkpatrick-Baez显微镜成像性质分析 被引量：12

Imaging characteristic analysis of Kirkpatrick-Baez microscope with periodic multilayer
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摘要 分析了Kirkpatrick-Baez(KB)显微镜的成像性质与周期多层膜元件间的关系。基于分辨力和集光效率要求,设计了KB显微镜的光学结构,模拟了KB系统的成像质量,用W/B4C周期多层膜反射镜进行了X射线成像实验,在±100μm视场内得到优于5μm的空间分辨力结果。实验与模拟结果的对比表明,加工精度和球差是影响中心视场分辨力的关键因素,有效视场的大小受多层膜角度带宽的限制。 Relation between imaging characteristic of Kirkpatrick-Baez（KB） microscope and periodic multilayer films is ana- lyzed. The optical structure of KB microscope is designed based on resolution and collection efficiency requirements. Imaging qual- ity is simulated, and 8 keV X-ray imaging experiment by KB microscope with W/B1 C periodic multilayer is performed, the resolu- tion is about 2 μm in central field and better than 5 μm in±100 μm field. The result comparison between simulation and experi ment shows spherical aberration and mirror machining precision are the key factors influencing the resolution of central field, and the range of effective field of view is lira{ted by angle bandwidth of periodic multilayer.
作者 伊圣振 穆宝忠 王新 黄圣铃 朱京涛 王占山 丁永坤 缪文勇 董建军
机构地区 同济大学精密光学工程技术研究所 中国工程物理研究院激光聚变研究中心
出处 《强激光与粒子束》 EI CAS CSCD 北大核心 2009年第11期1681-1685,共5页 High Power Laser and Particle Beams
基金 国家高技术发展计划项目
关键词 Kirkpatrick Baez显微镜 X射线成像 周期多层膜 像质 Kirkpatrick-Baez microscope X-ray imaging periodic multilayer imaging characteristic
分类号 O434.1 [机械工程—光学工程]
  • 相关文献

参考文献12

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二级参考文献42

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共引文献31

同被引文献170

  • 1潘宁宁,王占山,顾春时,秦树基,陈玲燕.X射线用Kirkpatrick-Baez显微镜成像质量的研究[J].强激光与粒子束,2006,18(1):61-65. 被引量：5
  • 2顾春时,王占山,王风丽,张众,穆宝忠,秦树基,陈玲燕.X射线Kirkpatrick-Baez显微镜用超反射镜的研制[J].强激光与粒子束,2006,18(7):1095-1098. 被引量：5
  • 3吴文娟,朱京涛,王占山,张众,王风丽,王洪昌,张淑敏,徐垚,程鑫彬,王蓓,李存霞,吴永荣,秦树基,陈玲燕,周洪军,霍同林.High Spectral Resolution Mo/Si Multilayers Working at High Order Reflection[J].Chinese Physics Letters,2006,23(9):2534-2537. 被引量：1
  • 4Gotchev O V,Jaanimagi P A,Knauer J P,et al.High-throughput,high-resolution Kirkpatrick-Baez microscope for advanced streaked imaging of ICF experiments on OMEGA[J].Rev Sci lnstrum,2003,74(3):2178-2181.
  • 5Rosch R,Boutin J Y,le Breton J P,et al.X-ray imaging with grazing-incidence microscopes developed for the LIL program[J].Rev Sci Instrum,2007,78:033704.
  • 6Bridou F,Mercier R,Raynal A,et al.Large field double Kirkpatrick-Baez microscope with non-periodic multilayers for laser plasma imaging[J].Rev Sci Instrum,73(11):3789-3795.
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  • 10Frederic J M,Su Oichang.Quantitative measurements with X-ray microscope in laser-tusion experiments[J].Rev Sci Instrum,1995,66(1):725-727.

引证文献12

二级引证文献42

强激光与粒子束
2009年 第11期

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