准分子激光全固态脉冲电源设计与实验研究

Design and experimental study of all solid state pulse power module for excimer lasers

针对脉冲能量5～8mJ的ArF准分子激光器，设计了基于可控硅开关结合三级磁脉冲压缩开关的全固态脉冲电源，采用园产可控硅和磁开关材料，获得了上升时间约150EIS，电压10～14kV，传递能量0．35～0．68j的激励脉冲，并实现了对准分子激光器快放电激励。三级磁开关总效率35％，分析表明磁开关损耗较大主要原因为电容能量转移不充分、导线铜损及磁芯材料铁损较大，并提出了相应改进办法。

A thyristor switched three-stage magnetic pulse compressor for ArF excimer laser was studied. This all solid state pulse power module can replace the commonly used thyratron switch. The thyristor and magnetic core used were both domestic products. The rise time of a high voltage pulse was compressed from 5 μs to 150 ns. Output energy of 0.35 J to 0.68 Jand voltage of 10 kV to 14 kV were obtained. The energy transfer efficiency of the three stage magnetic pulse compressor was 35%. At last, the reason for low efficiency was discussed and several measures were provided to improve the energy transfer efficiency.