摘要
激光直写法制造聚合物微流控芯片是一种新型微细加工技术,为了研究激光加工工艺参数与微流道深度的关系,利用实验室研制的精密实验台进行了CO2激光直写PMMA微流道实验研究。得到了激光功率、扫描速度、激光加工次数与微流道深度的关系,并对流道长度、流道深度和流道宽度的相互关系也进行了研究。实验结果表明,当激光功率在15 W～35 W,扫描速度在0.2 m/s～0.45 m/s范围内,理论模型与实验结果偏差最小,不超过6μm,该范围为最佳激光工艺参数范围。
Laser direct-writing manufacturing polymer microfluidic chip is a new micromachining technology. In order to study the relationship between laser processing parameters and microehannel depth, experimental research on CO2 laser micromaehining PMMA microchannel was carried out through a precision experimental table. The relationship among laser power, scanning velocity and machining passes and microchannel depth was obtained, and the interrelationship among microehannel length, microehannel depth and mieroehannel width was also studied. The experimental results indicates that the difference between the theoretical data and the experimental data is only about 6μm when the laser power is 15 W-35 W and the scanning velocity is 0.2 m/s-0.45 m/s.
出处
《机械科学与技术》
CSCD
北大核心
2009年第11期1447-1450,共4页
Mechanical Science and Technology for Aerospace Engineering
关键词
CO2激光
直写
微细加工
微流控芯片
微流道
CO2 laser
direct-writing
micromachining
microfluidic chip
microchannel
