基于微机电系统的振动能量采集器件设计分析

Design and Analysis of Vibration Energy Collector Based on MEMS

微能量采集器中电容式采集器易与IC工艺集成,目前已知的传统电容式微能量采集器都需要外加电压,这在很大程度上限制电容式微能量采集器的实际使用。针对该问题,基于微机电系统工艺,提出功函数原理电容式微能量采集器,给出采用两种不同金属作为电容极板电极的采集器原理模型设计,并建立相应系统数学模型,计算大致悬臂梁长度的设置与范围,使用有限元模拟软件ANSYS进行进一步分析与优化设计。在此理论基础上设计出的新型振动能量采集器,可克服传统电容式微能量采集器需要外界提供电源这一缺点。

The traditional electrostatic converters need separated voltage source which is very difficult in the practice. A new vibration-powered electrostatic converter with the principle of work functions is presented. The design of the converter is based on MEMS technology, and adopts two kinds of different metal as the electrode plates of the capacitor. The math model is established to determine the parameters of cantilever beam. And with the aid of the finite element software, this model is tested and the dimension is modified to ensure that the electrostatic converter can work optimally. This new method gets rid of the dependence on additional voltage source. The process flow is developed and the prototype collector is successfully produced.