摘要
A novel structure design of micro optic electro mechanical system（MOEMS）gyroscope is presented in this paper.The structure combining surface acoustic wave（SAW）sensor,optical waveguide diffractive component,electro-optical modulator etc.is integrated on a LiNbO3 substrate as the gyroscope for sensing rotating angular velocity,and an optical readout device is added on the traditional SAW typed TE-TM mode converter as the detecting device.The principles of the MOEMS are discussed in the paper,and simulation result shows that there would be apparent advantages of higher precision and stronger anti-vibration capacity.
A novel structure design of micro optic electro mechanical system（MOEMS）gyroscope is presented in this paper.The structure combining surface acoustic wave（SAW）sensor,optical waveguide diffractive component,electro-optical modulator etc.is integrated on a LiNbO3 substrate as the gyroscope for sensing rotating angular velocity,and an optical readout device is added on the traditional SAW typed TE-TM mode converter as the detecting device.The principles of the MOEMS are discussed in the paper,and simulation result shows that there would be apparent advantages of higher precision and stronger anti-vibration capacity.
基金
Sponsored by Postgraduate Science and Technology Innovation Fund of BIT(Rank A)
