电迁移加速测试模型参数分析及其趋势研究

Parameter and Trend Analysis on Electromigration Acceleration Model

对电迁移加速测试模型Black方程中参数的内在物理含义进行了研究,指出参数数值本身代表着电迁移的不同失效机理;对其在不同技术节点的数据进行了系统总结,给出了加速参数随着技术发展的变化趋势与合理范围,可以利用加速参数对工艺中的问题提供改进方向,为判断测试结果,测试条件和测试结构是否合理提供了参考基准;讨论了威布尔分布在电迁移测试中应用的可行性与优点,威布尔分布的形状参数为判断测试结果是否合理提供了更直接、有用的参考信息。

The physical representations of the acceleration parameters in Black equation were studied, which was commonly used in EM reliability modeling. It was pointed out that different values of the parameters represent different failure mechanisms. Meanwhile, for each technology node, a systematic summary on the parameters was given, it illustrates their corresponding trends, and the reasonable range of each parameter was provided so as to facilitate process enhancements. Moreover, for EM data analysis, the feasibility and advantages of using the Weibull distribution were discussed, the shape parameter of which provided more direct and informative messages on test results.