摘要
水平式隧穿磁强计在应用中,直梁所受的最大应力超出其许用应力出现直梁断裂的现象,同时由于所需驱动电压较高,限制了磁强计的应用范围。文中优先考虑梁内部应力对隧穿磁强计直梁尺寸进行设计,并改变其结构,采用新型的隧穿磁强计结构多梳齿结构,然后采用Ansys验证了改进后结构的正确性,同时对驱动电压和理论灵敏度进行了计算。研究结果表明:在保证直梁正常工作的前提下该设计可将磁强计所需的驱动电压降低到16.5V、在文中设计宽度下灵敏度较原宽度提高了1.35倍。
The straight girder easily arose fracture in the application of the horizontal tunneling magnetometer, as the maximum standing stress of the girder is not more than the permissible stress, and the driving voltage is very high that leads to limit the applied extension of magnetometer. So this paper gives priority to the stress of the interior of the straight girder, in which method designs the ruler of the straight girder of the horizontal tunneling magnetometer, then chance its structure, the use of new tunneling magnetometer structure of multi-comb structure, then whether or not the straight girder is fracture base on Ansys, and calculates the driving voltage of the structure and the sensitivity in theory. Results from investigation show that: on the premise of normal working of the straight girder, the magnetometer's driving voltage can decline to 16.5V, in this article under the design width the sensitivity is better than the original width increased 1.35 times.
出处
《机械工程师》
2009年第11期13-15,共3页
Mechanical Engineer
基金
上海市教育委员会科研项目--隧穿式MEMS磁强计的研制技术研究(06ZZ97)
关键词
隧穿磁强计
许用应力
多梳齿结构
驱动电压
灵敏度
tunneling magnetometer
the permissible stress
multi-comb structure
driving voltage
sensitivity