含纳米硅微粒的富硅二氧化硅的蓝色薄膜交流电致发光

BLUE ACTFEL FROM Si RICH SiO 2 CONTAINING SILICON NANOCRYSTALLITES

用磁控射频反应溅射制备了含纳米硅微粒的富硅ＳｉＯ２薄膜并获得了蓝色的交流薄膜电致发光．通过热退火结合喇曼散射等手段判定蓝色发光谱带与富硅ＳｉＯ２薄膜的纳米硅晶粒有关．

This paper proposed a new method to obtain EL from Si nanocrystallotes. Blue ACTFEL was observed from Si rich SiO 2 films prepared by if reactive magnetron sputtering technique. The blue bands were proved to relate to the Si nanocrystalline embedded in Si rich SiO 2 films by post annealing as well as Raman spectral analysis. The EL properties were consistent with the quantum size effect.