智能高精度温度控制退火炉的研制

PREPARATION OF A TEMPERATURE CONTROLLED INTELLIGENT ANNEALING FURNACE WITH HIGH PRECISION

在集成光学领域中，光波导制备工艺中的退火不仅能显著提高波导的光学质量，而且能灵活地调节折射率分布的轮廓及其增量．我们专门研制了一种智能高精度退火炉．具有体积小，精度高，自动控制，操作方便等特点．整个仪器分为控制箱和加热箱两大部分，加热器放置在加热箱中...

This paper elecribes the structure, operating principle and operation insturction of a temperature controlled intelligent annealing furnace whith high precision. The experimental results show that the temperature control precision is±0 1℃. The intelligent anneling furnace has the following characteristics, such as without super regulating high precision, simple in determing parameter, etc. through using AI atrificial intelligence algorithmic approach, in which PID algorithmic approach is improved and retained in certain degree and the rules of fuzzy regulating algorithmic approach is added.