波导与探测器吸收层垂直耦合结构中的光学耦合分析

Analysis of Optical Coupling in Vertically Coupling Structure of Waveguide and Photodetector Absorber

利用几何光学理论分析了波导与探测器吸收层之间的光学传播情况，以硅基波导与ＧｅＳｉ／Ｓｉ多量子阱ＰＩＮ探测器吸收层为分析对象，说明光学耦合效率与两层介质的折射率分布及吸收层长度的关系。

The coupling efficiency between the waveguide and detector absorber layer is duscussed on the basis of the geometric optics method. The dependence of the coupling efficiency on the refractive index distribution and length of absorption region in the vertically coupling structure is analysed.