1.30 μm/1.55 μm SiGe多模干涉滤波器

1.30 μm/1.55 μm SiGe Filters Based on Multimode Interference

用多模干涉原理分析和设计了光通信波长（１．３０μｍ～１．５５μｍ）的Ｓｉ１－ｘＧｅｘ／Ｓｉ滤波器，并用模的传播分析方法对其传输特性进行了研究。结果发现，在Ｇｅ含量ｘ＝０．０４时，干涉区的脊高和宽度分别为６．３５μｍ和８μｍ。如果多模干涉区长度ＬＭ＝２３０２．５μｍ，可滤１．３０μｍ而通１．５５μｍ的波长。且具有３１ｄＢ的对比度和０．０１ｄＢ的插入损耗；如果多模干涉区长度ＬＭ＝２５１２．５μｍ，可滤１．５５μｍ而通１．３０μｍ的波长。具有１６ｄＢ的对比度和０．０９ｄＢ的插入损耗。

A systematical analysis and design have been made for 1.30 μm/1.55 μm  Si 1-x Ge x/ Si  filters based on multi mode interference. Using the mode propagation analysis, transmission characteristics of the device were investigated. The results show that: 1) for 1.30 μm filter, the optimum coupler length is 2302.5 μm, and the contrast and insertion loss are 31 dB and 0.01 dB, respectively; 2) for 1.55 μm filter, the optimum coupler length is 2512.5 μm, and the contrast and insertion loss are 16 dB and 0.09 dB, respectively. For both of the filters, the Ge content x, rib height, and interfernce width are 0.04, 6.35 μm, and 8 μm, respectively.