物镜像差对激光扫描精度影响的测量与补偿

Measurement and compensation of laser scanningerror caused by objective aberration

在工程使用激光扫描进行放样时，物镜像差对扫描精度的影响是不能忽略的。本文提出的直接测量方法，可以对未知结构的大相对孔径物镜的扫描误差实现高精度测量，测量灵敏度可达最大扫描范围的０．０１％．根据这一测量结果采用线性插值对扫描误差进行补偿，能够保证像差造成的扫描误差小于０．０２％。实验结果及其数字模拟证明这种方法是有效的．

Affect of objective aberration on scanning accuracy can not be neglected whenlofting. The direct measurement method presented in the paper can estimate the error with highaccuracy for the objective. The sensitivity of the measurement can reach 0.01% of the scanningrange and the scanning error can be less than 0.02% after compensation by linearinterpolation. The experimental results and the numerical simulations show the effectiveness ofthe method proposed.