摘要
为了提高我们已研制成功的新型簧片式硅加速度传感器的性能，用有限元法计算了不同形状和尺寸的质量块在４０ｇ值加速度作用下产生的应力分布，使我们优选了最佳的质量块设计方案，显著地提高了灵敏度，取得了与理论计算符合得很好的实验结果。
A novel reed form silicon micro accelerometer has been designed and tested. The simulation of inertial stress in silicon films was completed by using finite element method. The optimization of inertial mass has been obtained. The sensitivity of the accelerometer was increased greatly.
出处
《仪表技术与传感器》
CSCD
北大核心
1998年第8期1-4,共4页
Instrument Technique and Sensor
基金
湖南省教委"九五"重大科研项目资助
