大角度激光干涉测角方法研究

STUDY ON LARGE ANGLE MEASURING METHOD WITH A INTERFEROMETER

传统激光干涉测角方法,大多采用迈克尔逊干涉仪光路或其变形,将角度测量转变为光程测量。但传统干涉测角方法测角范围通常很小,一般在±5°之间。后来虽然做了改进,但测角范围也只到95°(-45°～+50°)。在分析了传统干涉测角方法优缺点的基础上提出了一种新的干涉测角方法,在不降低系统灵敏度的前提下,测角范围极大提高,可到180°(±90°)。

Most of traditional methods of angular measurement based on a Michelson Interferome- ter or its modifications have the same principle:the rotation is transformed into an optical path difference(OPD).Generally,The measuring range using this is very small,only up to ±5°.Even though much development has been done,the range is still limited within the range of 90°(-45°±50°).A new interferometric angle measuring method is presented. By using it,the measuring range increases greatly and can run up to 180°(±90°).