微小流量pVTt法气体流量标准装置的研制

The development of micro flow pVTt gas flow standard device

介绍了20Lp VTt法气体流量标准装置的设计原理和方案,并给出了装置中主要参数的测试方法及装置的不确定度评定。

This paper has instructed the design principle and scheme of the gas flow calibration facility to 20L p.V.T.t, technique. It also has given the measuring method of the parameters and the uncertainty analysis of the facility.