摘要
采用中频非平衡磁控溅射技术制备Ti掺杂DLC(Ti-DLC)薄膜,对该薄膜的结构、内应力、结合强度进行了分析,分析了该薄膜与不同材料(Si3N4、钢、Ti-DLC)对摩时的摩擦磨损性能。结果表明,该方法沉积的DLC薄膜具有结构致密、内应力低、结合强度较高等特点;Ti-DLC的摩擦磨损性能与对偶材料有关,Ti-DLC与Si3N4对摩时摩擦因数最低,磨损率最高;Ti-DLC与钢对摩时摩擦因数最高,且伴随明显波动;Ti-DLC与Ti-DLC对摩时磨损率最低,达到10-8量级。
Ti-doped diamond-like carbon （Ti-DLC） films were deposited using a mid-frequency dual-magnetron sputtering system. The microstructure, stress and adhesion of the film were investigated. The tribological properties of the films sliding against different counterparts were investigated on a ball-on-disk tester. The results show that the films have some superior properties such as high adherence, high density and low stress. The counterparts play an important role in the tribological properties of the film. The DLC films exhibit the lowest friction coefficient and highest wear rate when sliding against Si3N4 ball, while the highest friction coefficient is obtained when the films slide against steel ball, and the lowest wear rate is obtained when the films slide against themselves.
出处
《润滑与密封》
CAS
CSCD
北大核心
2009年第11期36-39,共4页
Lubrication Engineering
基金
中国工程物理研究院机械制造工艺研究所所长基金项目(K587-09-JS)
关键词
磁控溅射
DLC薄膜
摩擦磨损性能
magnetron sputtering
DLC film
tribological properties
