氮化钼基硬质涂层研究进展

Development of MoN-Based Hard Coating

利用直流反应磁控溅射技术,使用Mo与C、Si、Al、W的复合靶,在不锈钢和硅(100)衬底上分别制备了MoCN、MoSiN、MoAlN、MoWN涂层。利用XRD、XPS、SEM、HRTEM方法分析了薄膜的微观结构利用纳米压痕技术和热重分析法测试了薄膜的硬度和抗氧化性能。研究结果表明,通过纳米复合化和固溶强化,可以大幅度提高MoN基硬质薄膜的硬度和抗氧化温度,说明MoN基硬质涂层具有较好的综合性能,可望在航空工业中得到广泛应用。

The MoCN, MoSiN, MoAlN, and MoWN coatings are synthesized on the substrates of stainless steel or silicon （100） with reactive magnetron sputtering method by using Mo, C, Si, Al and W composite target. The microstructure of these films were analyzed by XRD XPS SEMand HRTEM, and the hardness and oxidation resistance of these films are characterized by nano-indentation and TGA. The results illustrate that the hardness and oxidation resistance of the MoN-based films can be greatly enhanced through the nano-composite method and solid solution strengthening. Therefore, MoN-based hard coatings possess good comprehensive performance and would be applied widely in the aviation industry.