摘要
研究了电子探针测量镀膜厚度的方法。结果表明，用蒙特———卡洛模拟法测量镀膜厚度是简易而准确的。
A method for measuring plating film thickness with electron probe has been developed. The result shows that determination of the thickness by means of Monte-Carlo simulation is easy and accurate.
出处
《云南冶金》
1998年第4期51-54,共4页
Yunnan Metallurgy
关键词
电子探针
蒙特卡洛法
镀膜厚度
蒸镀
electron probe Monte-Carlo method plating film thickness
