环矩形真空吸浮导轨的仿真研究

Simulation analysis of annular rectangular vacuum hydrostatic guideway

基于设计给定的气浮静压垫结构参数,建立流体边界模型,利用流体分析软件进行分析,得出气体的流动轨迹、压强及速度的分布曲线。分析曲线表明:压强分布为在节流孔正对的位置最大,其他方向压强都减小;中间与气腔正对的部分压强最小,到边缘减小为零。气流速度在节流孔正对的区域最小;速度在中间层最大。通过分析可以为优化静压垫的结构、提高导轨刚度和承载能力提供理论依据。

Fluid boundary model is established based on the design of a given static pressure flotation cushion structural parameters. The model is analyzed through using fluid analysis software. The flow way of gas, pressure and speed of the distribution curve can be gained. Analysis curves show that airflow flows like beam. Pressure distribution is the largest in the orifice against location. The pressure all reduces in other direction. The pressure in middle part against gas chamber is the smallest in the exit at the edge along the length direction, and then decreases linearly to the edge reduced to zero. Flow velocity is the smallest against orifice. The velocity with the middle layer is the largest. Finite element analysis can provide a theoretical basis for optimizing the static pressure flotation cushion structure and improve the guide-way stiffness and load-bearing capacity.