摘要
描述了真空微电子器件的发展概况,特别对场发射阵列的结构设计进展、微波用场发射阵列研究、低压场发射阵列研究以及场发射平板显示器的现状进行了全面阐述。
In this paper,the general introduction of vacuum microelectronic device deve lopment is given.The emphasis is laid on the structure design progress of field emission array,investigations of field emission array for microwave and low voltage field emission array,as well as the current status of field emission panel display.
出处
《半导体情报》
1998年第5期8-16,共9页
Semiconductor Information
关键词
真空微电子管
场发射阵列
场发射显示器
Vacuum microelectronic device Field emission array Field emission display