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生长在尖晶石衬底上的GaN外延层的喇曼散射研究

Raman Scattering of GaN Epilayer Grown on MgAl 2O 4 Substrate
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摘要 在室温下测量了用MOVPE方法生长在尖晶石(MgAl2O4)衬底上的GaN外延层的一阶喇曼光谱.应用各种背散射和90°散射配置,测得了除低频E2模外所有GaN的喇曼活性光学声子模.并且在X(Z,X)Z和X(Y,Y)Z配置下观测到了由A1和E2模混合形成的准TO和准LO模. Abstract First order Raman spectra of GaN epilayer grown by MOVPE on MgAl 2O 4 substrate were measured at room temperature. By using various back and rightangle scattering geometry, all symmetry allowed optical phonons were observed, except the low frequancy E 2 mode. The quasitransverse Q (TO) and quasilongitudinal Q (LO) modes were also observed in the X(Z,X)Z and X(Y,Y)Z configurations, which have the mixed A 1 and E 1 symmetry character. All the results are in good agreement with the group theoretical selection rules.
出处 《Journal of Semiconductors》 EI CAS CSCD 北大核心 1998年第11期865-870,共6页 半导体学报(英文版)
基金 国家自然科学基金
关键词 氮化镓 外延生长 喇曼散射 尖晶石衬底 Metallorganic vapor phase epitaxy Raman scattering
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参考文献1

  • 1段树坤,半导体学报,1997年,18卷,787页

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