摘要
磁控溅射镀膜技术在薄膜制备领域广泛应用,控制系统的设计对磁控溅射镀膜设备的稳定运行有着重要的影响。介绍了基于嵌入式一体化工控机和PLC的真空磁控溅射镀膜设备电气自动控制系统的硬件构成、系统原理、系统功能,论述了其设计思路及方法,并重点叙述了OMRON CJ系列PLC在控制系统中的应用。
The magnetron sputtering ＆ coating technique has been widely used in the film preparation field,and the design of the control system has important influence on the stable operation of magnetron sputtering ＆coating equipment.This paper introduces the hardware composition,system principle and system function of the electrical auto-control system of vacuum magnetron sputtering ＆ coating equipment based on embedded and integrated industrial computer and PLC,and discusses its design thought and method,and expounds the application of OMRON CJ series PLC in the control system.
出处
《科技情报开发与经济》
2009年第31期117-120,共4页
Sci-Tech Information Development & Economy
基金
电子预研项目(项目编号:62501070501)的研究成果之一
关键词
磁控溅射镀膜技术
可编程控制器
工控机
magnetron sputtering ＆amp
coating technique
PLC
industrial computer
