摘要
提出了一种利用软模压印制备微透镜阵列的技术。采用传统的光刻胶热熔方法制备微透镜阵列母板,利用复制模具的方法在聚二甲基硅氧烷(PDMS)上得到一个和母板表面图形相反的模具,最后通过压印的方法把PDMS模具上的图形转移到涂有紫外固化胶的玻璃基片上,待紫外胶完全固化后可得到和母板一致的微透镜阵列。经过测试微透镜阵列的焦点图像和表面形貌可发现最后制备的微透镜阵列表面形貌均匀、聚焦性能良好、光强均匀。
A method for fabrication of microlens arrays using soft lithography is reported. The master of the microlens array is fabricated by traditional thermal reflow technology. The microlens array is first transferred on an elastomeric mold using replica molding method,and then the elastomeric mold with microlens structure on its surface is imprinted on the glass substrate with ultraviolet （UV） curable polymer on it. After the UV glue was fully solidified,the final microlens array is formed on the UV curable polymer of glass substrate. The microlens array is tested and it is found that it has uniform focusing function. This technology has great potential application for fabrication of polymer microlens array with low cost and high throughput.
出处
《中国激光》
EI
CAS
CSCD
北大核心
2009年第11期2869-2872,共4页
Chinese Journal of Lasers
基金
国家自然科学基金(60878035)
国家973计划(2006CB80600)资助课题
关键词
光学制造
微透镜阵列
光刻胶热熔法
软刻蚀
压印技术
optical fabrication microlens array thermal reflow soft lithography imprint technology
