不同衬底对离子束辅助沉积TiC_xN_y膜力学性能影响的研究

Influence of Different Substrates on Mechanical Properties of TiC_xN_y Films Deposited by Ion Beam Assist

用离子束辅助沉积（IBAD）技术在TC4钛合金和9Cr18、GCr15钢基体上形成了TiCxNy膜，TEM观察发现膜均呈多晶结构，都具有（111）、（200）和（220）择优取向。AES和XPS分析进一步证实，TiCxNy膜呈含氧配置。膜的硬度和摩擦特性与N含量有关，总的趋势是N的含量过高，其硬度与摩擦性能均下降。在本试验条件下，以注入量3×1017ions／cm2的辅助剂量最佳。干摩擦表明膜的抗氧化性能优良，能有效抑制基体在摩擦过程中氧化膜的形成。又由于膜的硬度高，润滑性良好，各种基体的磨损特性都得到了显著改善。

TiCxNy films were formed on TC4, 9Cr18 and GCr15 substrates using ion beam assisted deposition. TEM revealed that the films had polycrystalline structure with (111), (200) and (220) prefered orientation. TiCxNy films containing oxygen coordination were further confirmed by AES and XPS. Microhardness and friction properties of the films are relative to its N content, both the hardness and the friction properties are decreased as a excessively high N content, and an assisted dose of 3 ×1017ions/cm2 is optimum in these experiments. The dry friction test indicats that oxidation resistance of the films is excellent, formation of the oxide film in the friction process can be effectively inhibited because of its presence on the steel substrates. At the same time, the wear properties of substrates, especially the adhesive were resistance, are obviously improved because of high hardness and excellent lubrication of the films.