掠射技术与X射线荧光分析

GRAZING TECHNIQUES AND X RAY FLUORESCENCE ANALYSIS

掠射技术引入Ｘ射线荧光分析成为一种新的材料及薄膜分析技术。运用此技术可以给出材料表面及薄膜的密度、厚度、界面粗糙度、成分的深度和剖面分布等各种信息。

X ray analysis has become a new analysis method of material and thin film.Using this method,we can obtain much information on material such as density,layer thickness,interface roughness and compositional depth profile.Application and development of grazing technique in X ray fluorescence analysis are introduced in this paper.