热阴极离子镀技术制备特种硬质薄膜及性能研究

Preparation of the CrNx hard Coating by Hot Cathode Ion Plating Technology and Analysis of Its Properties

采用热阴极离子镀技术在YG6基体上制备了CrNx薄膜,利用X射线衍射方法、划痕试验、扫描电镜观察对所制备的试样进行了物相、结构分析和性能测试。结果表明:热阴极离子镀技术能够制备出CrNx薄膜;膜-基结合强度好;膜层呈致密的柱状晶;5号试样性能最佳。参考5号试样工艺在模具表面镀CrNx薄膜,将镀层与未镀层的模具做加工试验对比,镀层后能显著提高模具的寿命。

CrNx films are prepared on YG6 basal body by hot cathode ion plating technology, and samples including phases,structures and properties are detected by X ray diffraction analysis and scratch test scanning as well as electron microscope. The results indicate ： preparation of CrNx film by hot cathode ion plating technology is feasible ; good cohesion strength between film and substrate is attained; the film exhibits compact columnar crystals; the performance of sample No. 5 is optimal. CrNx film is prepared on the mould surface according to the technology used for sample No. 5. The comparison between the mould with film and mould without film shows that the life of the mould with the film is obviously improved.