摘要
介绍了新型压电晶体四硼酸锂的压电和声表面波特性，讨论了四硼酸锂晶体基片声表面波器件的制作工艺，总结了近年来四硼酸锂晶体压电器件的研究成果。
Piezoelectric and SAW properties of Li 2B 4O 7 single crystals are presented and the fabrication procedures of SAW devices on Li 2B 4O 7 substrates are discussed in this paper. Several kinds of SAW devices developed in recent years, such as resonators, filters and resonator filters, are reviewed.
出处
《压电与声光》
CSCD
北大核心
1998年第5期293-296,共4页
Piezoelectrics & Acoustooptics
关键词
四硼酸锂晶体
声表面波
压电器件
lithium tetraborate crystal, SAW, piezoelectric , device
