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Micro-structure sensors based on ZnO microcrystals with contact-controlled ethanol sensing 被引量:7

Micro-structure sensors based on ZnO microcrystals with contact-controlled ethanol sensing
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摘要 ZnO microcrystals are synthesized through a facile solution method and characterized by field-emission scanning electron microscopy, transmission electron microscopy, selected area electron diffraction and X-ray diffraction. The ethanol sensing properties of these microcrystals are investigated by spin-coating them on a silicon substrate with Pt electrodes to fabricate a micro-structure sensor. The sensitivity is up to 8 when the sensor is exposed to 50 ppm ethanol, and the response time and recovery time are 10 s and 20 s, respectively. A contact-controlled model is established to explain the sensing properties of the microcrystals, which provides another approach to realize high-performance gas sensors. ZnO microcrystals are synthesized through a facile solution method and characterized by field-emission scanning electron microscopy, transmission electron microscopy, selected area electron diffraction and X-ray diffraction. The ethanol sensing properties of these microcrystals are investigated by spin-coating them on a silicon substrate with Pt electrodes to fabricate a micro-structure sensor. The sensitivity is up to 8 when the sensor is exposed to 50 ppm ethanol, and the response time and recovery time are 10 s and 20 s, respectively. A contact-controlled model is established to explain the sensing properties of the microcrystals, which provides another approach to realize high-performance gas sensors.
出处 《Chinese Science Bulletin》 SCIE EI CAS 2009年第23期4371-4375,共5页
基金 Supported by the National Natural Science Foundation of China (Grant No. 10672139)
关键词 结构传感器 微晶涂层 控制模型 氧化锌 乙醇 感应 基础 选区电子衍射 ZnO, ethanol, micro-structure sensors, semiconducting metal oxides
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