基于厚膜混合集成的电容式加速度传感器

Thick-film hybrid integrated capacitive accelerometer

为了减小电容式加速度计的体积,提高检测精度、扩展应用范围,采用厚膜混合集成工艺,将检测电路和电容式加速度计敏感单元集成于一体。详细介绍了厚膜混合集成工艺的版图设计和制作过程,并介绍了制作工艺中的各道工序。用UP-16封装形式,对厚膜混合集成电容式加速度计进行了封装。经过与原电路比较后可知经厚膜混合集成后,体积大大减小,经封装后通过金属外壳接地,提高抗干扰能力,经测试,其测试精度能提高1-2个数量级。

In order to reduce the volume of capacitive accelerometer , improve detection accuracy, scope of technology application, is used to thick-film integrate hybrid detecting expand the integration circuit and sensitive part of capacitive accelerometer in one unit. The layout design and making process of thick-film hybrid integrated cell is introduced in detail in this paper, as well as each process of production. Finally, UP-16 package is used to package the thick-film hybrid integrated capacitive accelerometer. After comparison with the original circuit, it is obvious that the volume of new accelerometer is reduced greatly. Besides this , the anti-interference ability is increased by grounding of metal case. The test is showed that the measuring accuracy can be increased 1-2 orders of magnitude.