摘要
压电陶瓷(PZT)作为微位移的执行装置,在光学测量方面得到广泛的应用.运用虚拟仪器软件设计的压电陶瓷相移器驱动、校正与位移精度控制系统,准确方便地实现了对压电陶瓷相移器的控制.通过LabVIEW编写的程序采集数据对PZT的位移量进行分析和计算,提出一种测量PZT驱动电压与位移曲线的新方法.通过Lab-VIEW控制数据采集卡的输出电压来控制PZT的驱动,位移精度可以达到纳米(nm)量级.
As an execution device of micro-placement, the piezoelectric ceramics （PZT） is used in optical measurement. In order to control the phase-shifter accurately and conveniently, a system to drive and calibrate PZT and control the precision of displacement by using virtual instrument software is designed. The displacement of PZT can be analyzed and calculated according to collected data by programming which is designed by LabVIEW. A new method is introdueed for calibrating the displacement-voltage curves of PZT. By controlling the driver of PZT from the data-acquisition board output voltage, the displacement precision of PZT with order of nano-meter can be reached.
出处
《暨南大学学报（自然科学与医学版）》
CAS
CSCD
北大核心
2009年第5期479-482,共4页
Journal of Jinan University(Natural Science & Medicine Edition)
基金
国家自然科学基金项目(60747001
60877070
60467003)
关键词
光学测量
相移测量
压电陶瓷
位移
optical measurement
phase-shifting measurement
PZT
displacement
