基于虚拟仪器的光纤MEMS法-珀压力传感器复用系统

Multiplexing System of Optical Fiber MEMS Fabry-Perot Pressure Sensors Based on Virtual Instrument

提出一种基于虚拟仪器的光纤MEMS法-珀压力传感器的空分复用系统,实现了多个光纤F-P传感器的准分布式实时测量。利用虚拟仪器技术,对传感器的反射信号进行采集和相应的处理,从而解调出传感器所受到的压力。传感器的反射信号以及所受压力值都能在图形界面上实时显示并保存。实验结果表明,该系统具有良好的线性、灵敏度和精度,复用能力强,能实现压力的准分布式测量,操作方便,响应速度快。

A space division multiplexing system of optical fiber MEMS Fabry - Perot pressure sensors based on virtual instrument is presented, which realizes real-time quasi-distributed measurement with several optical fiber Fabry - Perot sensors. A data acquisition and analysis system based on the virtual instrument technique is designed. Pressure on the sensor is demodulated by Fourier Transformation and other processing of the reflected signal of the sensor. The realtime reflected signal and pressure of sensor are displayed on graphical interfaces and can be saved. The experimental results demonstrate that the system has reasonable linearity, sensitivity and precision. Quasi-distributed measurement of the pressure is realized with easy operation and fast response speed.